Accelerating voltage

30kV

In-chamber image detection

Everhart-Thorney SEI
Scintillator or solid state BEI

Through-lens detectors

SE and BE standard

In-column Faraday Cage

Not available

Variable chamber vacuum

1-150Pa

Magnification range

10x to 2,500,000x

Fully Eucentric 6-axis stage

X=100mm, Y=100mm, Z=50mm, Z'=10mm, Rotate=360º,
Tilt=-10º to +90º

Stage motorisation

X, Y and Z - standard rotate and tilt - optional

Alternative 6-axis stage

X=100mm, Y=150mm

Chamber size

315mm high x 415mm x 315mm